Polysilicon – The ‘Foundation’ of Chips

Polysilicon production is a critical and indispensable upstream foundational step in the semiconductor industry. No high-purity polysilicon, no high-performance chips. Electronic-grade polysilicon requires an exceptional purity level of 99.999999999% (11N). Even minute impurities can make huge differences. Moreover, high-precision filtration components serve as the “core guardians” in the production process, consistently ensuring the ultra-high purity of the raw materials.

Challenges in the Production Process

The core production processes for polysilicon (e.g. improved Siemens process) are beset with challenges:

Particulate Contamination: Chemical reactions generate abrasive, ultrafine particles. If these particles are not effectively filtered out and enter downstream or recycling units, they can clog pipelines and damage equipment. Furthermore, if contaminants mix into the final product, they can disrupt the orderly arrangement of silicon atoms, which would cause lattice defects. This leads to a sharp decline in chip yield and potential performance failures.

Harsh Reaction Environment: The process involves a complex atmosphere with high temperatures, high pressures, and corrosive gases (e.g., chlorine, hydrogen chloride). This significantly accelerates the corrosion and wear of production equipment.

Fugitive Dust Emissions: Handling raw materials and finished products during crushing, screening, conveying, and packaging generates silicon powder dust. If not properly contained and collected, this dust can escape into the surrounding environment as fugitive emissions, posing serious risks to the local environment, equipment integrity, and worker health.

Therefore, to ensure high product yield and to maintain a safe production environment for personnel, implementing absolutely reliable filtration for gases before and after reactions, as well as for waste emissions, is essential.

Reasons for Choosing Our Sintered Metal Cartridges

In the demanding environment of polysilicon production, sintered metal filter cartridges from Shinkai offer irreplaceable advantages over other filter media:

▶ Exceptional Precision and Reliability​

Precise control over powder particle size combined with sintering technology results in a uniform and stable pore size distribution. This enables highly efficient capture of sub-micron particles and provides the most solid guarantee for final product purity.

▶ Outstanding High-Temperature Resistance​

Our cartridges can withstand extreme temperatures up to 900°C, far exceeding typical process requirements. At this temperature, the cartridges remain stable and consistent without melting, aging, or releasing volatiles.

▶ Superior Resilience, Strength and Durability

The elements combine high mechanical strength with resilience, enabling them to withstand significant pressure fluctuations and high-pressure differentials without risk of cracking. This results in a service life significantly longer than that of ceramic filter cartridges.

▶ Excellent Corrosion Resistance with Premium Materials

Manufactured from top-grade materials such as 316L stainless steel, Hastelloy, and Inconel alloys, these cartridges provide perfect resistance against strong corrosive and reducing media, including HCl, H₂, TCS, and STC.

▶ Stable Structure to Avoid Contamination

The monolithic sintered structure means no fibers can detach or shed. This fundamentally avoids secondary contamination of the process stream, making these filters an ideal choice for achieving electronic-grade purity.

Gas-Solid Filtration System: More Than Just Cartridges

Shinkai not only provides cartridges but also offers complete system solutions. The followings are the key features of our high-temperature gas-solid filtration system with online blowback:

▶ Automatic Regeneration: A fully automatic blowback cleaning system is equipped to restore the performance of filter cartridges online, ensuring continuous production while reducing maintenance effort and costs.

▶ Economical in Long-term Use: Cartridges with long service life, combined with efficient regeneration system can significantly reduce overall operating cost.

▶ Safety and Stability: The fully enclosed system design and fully automatic operation minimize the need for manual intervention, thereby ensuring a safer working environment for personnel.

▶ Streamlined Operation: The equipment boasts a rational structure, straightforward installation, and user-friendly operation.

Nanjing Shinkai’s sintered metal filter cartridges, used in high-temperature filtration systems, ensure the safety, environmental compliance, stability, and high efficiency of silicon material production. With exceptional reliability under high-temperature and corrosive conditions, extremely low metal ion release, and outstanding filtration precision, our cartridges have successfully assisted leading manufacturers in the stable mass production of electronic-grade high-purity polysilicon. We will continue to provide more robust support from the raw material source for China’s semiconductor industry chain.

Nanjing Shinkai Filter Co., Ltd.

www.shinkaifilter.com

Hotlines:
025-66989518

025-66989516

Email: info@shinkaifilter.com