High Purity Filters in Semiconductor


Shinkai’s precision filters with higher purity to 3nm(0.003μm) are designed specifically for critical service in semiconductor or analytical instrumentation. All regulator models are direct-acting, non-relieving, and are supplied with a sintered stainless steel filter cartridge on the inlet. We offer several distinct models with a variety of process connections, spring ranges and diaphragm materials to satisfy the most demanding instrument applications

The gas passes uniformly through the porous metal element with minimal friction, with a longer service life, and up to Max 55000psi, almost 380mPa.

Particle Size Retention
Mean Pore Size
Mechanical Properties

Filter House/ Body: 316L SS
Filter Medium: 316L SS

Exhaust Gas and Waste Gas
High temperature gases generated in a direct liquid injection system
Low vapor pressure gases from a mixture of chemical precursor vapor liquid source volatile precursors

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